Porosity effects on different measured acoustic parameters of porous silicon

被引：12

作者：

Boumaiza, Y ^{[1
]}

Hadjoub, Z ^{[1
]}

Doghmane, A ^{[1
]}

Deboub, L ^{[1
]}

机构：

[1] Univ Annaba, Inst Phys, Semicond Lab, DZ-23000 Annaba, Algeria

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1999年 / 18卷 / 04期

关键词：

D O I：

10.1023/A:1006618920416

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The porosity effects on acoustic longitudinal velocity, Rayleigh velocity, transverse velocity, impedances, Young's moduli, and shear moduli of porous silicon thin films were studied using scanning acoustic microscopy and high-frequency microechography. Film thickness greatly influenced the propagating surface acoustic waves. The longitudinal acoustic impedance decreased as the porosity increased.

引用

页码：295 / 297

页数：3

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