Scanning tunneling microscopy head having integrated capacitive sensors for calibration of scanner displacements

被引：16

作者：

Picotto, GB ^{[1
]}

Desogus, S ^{[1
]}

Lanyi, S ^{[1
]}

Nerino, R ^{[1
]}

Sosso, A ^{[1
]}

机构：

[1] SLOVAK ACAD SCI,INST PHYS,BRATISLAVA 84228,SLOVAKIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 02期

关键词：

D O I：

10.1116/1.589170

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Scanning tunneling microscopy heads having some tip-displacement measurement capability are essential for quantitative and accurate measurements. A scanning tunneling microscopy head based on a bimorph parallelogram scanner with a metallized glass cube situated above the tunneling tip is described; The cube acts as a counterelectrode or as a minor for capacitance-based and interferometric measurements of scanner displacements. The capacitive sensors are mounted on differential screws facing the cube in such a way that the lateral Abbe error in the measurement of actual tip-displacements is minimized. The sensor electronics uses a Howland-type alternating current source, and has a deviation from linearity of less than 0.15% up to 30 mu m and a low frequency bandwidth of 1 kHz. (C) 1996 American Vacuum Society.

引用

页码：897 / 900

页数：4

共 14 条

[1] CAPACITIVE SENSORS COUPLED TO A SCANNING TUNNELING MICROSCOPE PIEZOSCANNER FOR ACCURATE MEASUREMENTS OF THE TIP DISPLACEMENTS [J].