Micromagnetic actuators

被引：20

作者：

Arai, KI

Honda, T

机构：

来源：

ROBOTICA | 1996年 / 14卷

关键词：

micromagnetic actuators; magnetic torque; magnetostriction; microrobots;

D O I：

10.1017/S0263574700019949

中图分类号：

TP24 [机器人技术];

学科分类号：

080202 ; 1405 ;

摘要：

Recent topics in the development of micromagnetic actuators in Japan are reviewed. Electromagnetic microactuators less than 1 mm in diameter, e.g. micromotor, and microvalves have been fabricated and their high performance has been demonstrated. A new type microactuator based upon magnetostriction has also been developed and has shown a large cantilever deflection. In addition, some models of the microrobots using micromagnetic actuators were able to move using a wireless remote power supply.

引用

页码：477 / 481

页数：5

共 14 条

[1]

Ahn C. H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P1, DOI 10.1109/MEMSYS.1993.296940

[2]

AKAMINE S, 1990, SENSOR ACTUATOR, V21, P964

[3]

Clark A.E., 1980, FERROMAGNETIC MAT, V1

[4]

Fukuda T., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P210, DOI 10.1109/MEMSYS.1991.114798

[5]

Guckel H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P7, DOI 10.1109/MEMSYS.1993.296942

[6] DEPENDENCE OF MAGNETOSTRICTION OF SPUTTERED TB-FE FILMS ON PREPARATION CONDITIONS [J].

HAYASHI, Y ;

HONDA, T ;

ARAI, KI ;

ISHIYAMA, K ;

YAMAGUCHI, M .

IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) :3129-3131

[7] FABRICATION OF MAGNETOSTRICTIVE ACTUATORS USING RARE-EARTH (TB,SM)-FE THIN-FILMS (INVITED) [J].

HONDA, T ;

ARAI, KI ;

YAMAGUCHI, M .

JOURNAL OF APPLIED PHYSICS, 1994, 76 (10) :6994-6999

[8] MAGNETOSTRICTION OF SPUTTERED SM-FE THIN-FILMS [J].

HONDA, T ;

HAYASHI, Y ;

ARAI, KI ;

ISHIYAMA, K ;

YAMAGUCHI, M .

IEEE TRANSACTIONS ON MAGNETICS, 1993, 29 (06) :3126-3131

[9]

Hosaka H., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P12, DOI 10.1109/MEMSYS.1993.296943

[10]

ITOH T, 1994, J MAGN SOC JAPAN, V18, P922

← 1 2 →