Fabrication of barium titanate thin films by potentiostatic electrochemical deposition

被引:6
作者
Nomura, K
Shibata, N
Maeda, M
机构
[1] Nagoya Inst Technol, Dept Appl Chem, Showa Ku, Nagoya, Aichi 4668555, Japan
[2] Japan Fine Ceram Ctr, Atsuta Ku, Nagoya, Aichi 4568587, Japan
关键词
electrochemical deposition; electrolysis; ferroelectric thin film; barium titanate; barium nitrate;
D O I
10.2109/jcersj.109.1275_915
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
BaTiO3 thin films were prepared on Pt/Ti/SiO2/Si substrates in a water-methyl alcohol mixed bath, nearly saturated with barium nitrate, by potentiostatic electrochemical deposition. Weights and compositions of the as-grown films were controlled by regulating electrochemical parameters such as the electrode potential, the quantity of electricity, and the concentrations of Ti (IV) peroxo complexes in the electrolysis bath. Ba/Ti ratios in the as-grown films were constant along the depth direction. No impurity in the as-grown films was detected. The as-grown films were amorphous, and Ba2+ ions in them were present mainly as barium nitrate. Polycrystalline BaTiO3 thin films were obtained by annealing above 500 degreesC for 1 h in air. The BaTiO3 thin films were crystallized at a relatively low temperature of approximately 500 degreesC due to easy decomposition of barium nitrate to barium oxide and nitrous gas during annealing.
引用
收藏
页码:915 / 919
页数:5
相关论文
共 20 条
[11]   ELECRODEPOSITION OF SR-TI ALLOYED FILMS FROM AN AQUEOUS BATH [J].
PAWAR, SH ;
PAWASKAR, PN ;
MUJAWAR, HA .
MATERIALS CHEMISTRY AND PHYSICS, 1994, 36 (3-4) :236-240
[12]   FERROELECTRIC MEMORIES [J].
SCOTT, JF ;
DEARAUJO, CAP .
SCIENCE, 1989, 246 (4936) :1400-1405
[13]   DEVELOPMENT AND FABRICATION OF THIN-FILM BATIO3 CAPACITORS USING RADIOFREQUENCY MAGNETRON SPUTTERING [J].
SHI, ZQ ;
JIA, QX ;
ANDERSON, WA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1993, 11 (04) :1411-1413
[14]  
SUNG TH, 1898, J CERAM SOC JPN, V97, P1039
[15]  
SWITZER JA, 1987, AM CERAM SOC BULL, V66, P1521
[16]  
TAGAWA H, 1984, B I ENV SCI TECH YOK, V11, P69
[17]   ELECTRICAL CHARACTERISTICS OF BARIUM-TITANATE FILMS PREPARED BY LASER-ABLATION [J].
YEH, MH ;
LIU, YC ;
LIU, KS ;
LIN, IN ;
LEE, JYM ;
CHENG, HF .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (03) :2143-2145
[19]   Electrolytic deposition of oxide films in the presence of hydrogen peroxide [J].
Zhitomirsky, I .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1999, 19 (15) :2581-2587
[20]   Cathodic electrosynthesis of titania films and powders [J].
Zhitomirsky, I .
NANOSTRUCTURED MATERIALS, 1997, 8 (04) :521-528