Characterization of vapour deposited products in furnace tube during SiC synthesis from carbonized rice hulls

被引:13
作者
Han, HW [1 ]
Liu, HS [1 ]
机构
[1] Natl Cheng Kung Univ, Dept Mineral & Petr Engn, Tainan 70101, Taiwan
关键词
carbonized rice hulls (CRH); vapour deposited product; reaction zone; cold zone; SiOxCy; SiC; chemical vapour deposition (CVD);
D O I
10.1016/S0272-8842(98)00077-7
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The vapour deposited products on graphite substrates in the cold zone (1270-600 degrees C) for the preparation of SiC from carbonized rice hulls (CRH) in a vacuum tube furnace, which is operated at a reacting sample chamber temperature of 1300 degrees C, have been characterized by various analytical techniques, such as SEM/EDS, XRD, FTIR, XPS and AES. Morphology/size, chemical composition, lattice/electronic structure, and molecular vibration modes of these products have been obtained. The primary deposited product in zone A (1270-1050 degrees C) was a thin film, consisting of SiOxCy and SiC; in zone B (105-820 degrees C) were whiskers aggregates, consisting of crystalline Si and amorphous SiO2; in addition, in zone C (820-600 degrees C) spheroids aggregates have been observed consisting of amorphous Si and SiO2. The morphology sequence of the deposits in the cold zone, e.g. the thin film (SiOxCy/SiC)-->whiskers (Si/SiO2)-->spheroids (Si/SiO2), seem to be related to the substrate temperature and degree of supersaturation of the reacting gas (SiO). (C) 1999 Elsevier Science Ltd and Techna S.r.l. All rights reserved.
引用
收藏
页码:631 / 637
页数:7
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