Microstructural analysis in epitaxial zirconia layers

被引:16
作者
Boulle, A
Pradier, L
Masson, O
Guinebretière, R
Dauger, A
机构
[1] ENSCI, UMR 6638, F-87065 Limoges, France
[2] Fac Sci, F-87060 Limoges, France
关键词
oxide layer; X-ray diffraction; epitaxy; sol-gel;
D O I
10.1016/S0169-4332(01)00710-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Y2O3 stabilised ZrO2 (YSZ) layers were deposited on (11 (2) over bar0) Al2O3 by sol-gel dip-coating, A low temperature heat treatment produces a poly crystalline film. Further heating at 1500 degreesC yields an epitaxial layer by grain growth of the islands with the lowest interfacial energy. We used a home-made high resolution diffractometer to record reciprocal space maps of the YSZ layer. The simulation of the diffraction profiles with a kinematical scattering model enables us to extract the strain profile within the layer, the average thickness and the vertical island size distribution, (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:80 / 84
页数:5
相关论文
共 21 条
[1]  
[Anonymous], 1999, HIGH RESOLUTION XRAY
[2]   Miscut angles measurement and precise sample positioning with a four circle diffractometer [J].
Boulle, A ;
Masson, O ;
Guinebretière, R ;
Dauger, A .
APPLIED SURFACE SCIENCE, 2001, 180 (3-4) :322-327
[3]   X-Ray diffraction line broadening by stacking faults in SrBi2Nb2O9/SrTiO3 epitaxial thin films [J].
Boulle, A ;
Legrand, C ;
Guinebretière, R ;
Mercurio, JP ;
Dauger, A .
THIN SOLID FILMS, 2001, 391 (01) :42-46
[4]   HETEROEPITAXY OF CUBIC ZIRCONIA ON BASAL AND PRISMATIC PLANES OF SAPPHIRE [J].
CAIN, MG ;
LANGE, FF .
JOURNAL OF MATERIALS RESEARCH, 1994, 9 (03) :674-687
[5]   Structural characteristics of Y2O3 films grown on oxidized Si(111) surface [J].
Cho, MH ;
Ko, DH ;
Choi, YK ;
Lyo, IW ;
Jeong, K ;
Kim, TG ;
Song, JH ;
Whang, CN .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (03) :1647-1652
[6]   X-RAY-DIFFRACTION FROM LOW-DIMENSIONAL STRUCTURES [J].
FEWSTER, PF .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (11) :1915-1934
[7]   Sol-gel fabrication of heteroepitaxial zirconia films on MgO(001) substrates [J].
Guinebretière, R ;
Dauger, A ;
Masson, O ;
Soulestin, B .
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1999, 79 (07) :1517-1531
[8]   TETRAGONAL ZIRCONIA POWDERS FROM THE ZIRCONIUM N-PROPOXIDE ACETYLACETONE WATER ISOPROPANOL SYSTEM [J].
GUINEBRETIERE, R ;
DAUGER, A ;
LECOMTE, A ;
VESTEGHEM, H .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 147 :542-547
[9]   The effect of surface structure on the growth of ceramic thin films [J].
Heffelfinger, JR ;
Carter, CB .
PHILOSOPHICAL MAGAZINE LETTERS, 1997, 76 (03) :223-232
[10]   Transmission electron microscopy-energy-dispersive X-ray spectroscopy analysis of the modulated structure in ZrO2-6 mol% Y2O3 alloy [J].
Katamura, J ;
Shibata, N ;
Ikuhara, Y ;
Sakuma, T .
PHILOSOPHICAL MAGAZINE LETTERS, 1998, 78 (01) :45-49