Resolution enhancement and improved data interpretation in electrostatic force microscopy -: art. no. 245403

被引:187
作者
Colchero, J [1 ]
Gil, A [1 ]
Baró, AM [1 ]
机构
[1] Univ Autonoma Madrid, Fac Ciencias, Dept Fis Mat Condensada, E-28049 Madrid, Spain
来源
PHYSICAL REVIEW B | 2001年 / 64卷 / 24期
关键词
D O I
10.1103/PhysRevB.64.245403
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The electrostatic interaction between a model probe and a sample in a scanning probe microscope is analyzed. A simple model for a real experimental setup is proposed and solved by means of in appropriate approximation. In addition, a quantitative definition for resolution is presented. We find that generally the total force between tip and sample is dominated by contributions which are not confined to a nanometer-sized region under the tip apex. From our analysis we conclude that such a confinement is only obtained either with specially designed probes or by using the force gradient as signal source. We show that reliable experimental data acquired by local Kelvin probe microscopy can only be obtained if these considerations are taken into account. Finally, we propose an experimental setup which optimizes resolution and gives the correct local surface potential in the case of Kelvin probe microscopy.
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页数:11
相关论文
共 30 条
[1]   LATERAL DOPANT PROFILING IN SEMICONDUCTORS BY FORCE MICROSCOPY USING CAPACITIVE DETECTION [J].
ABRAHAM, DW ;
WILLIAMS, C ;
SLINKMAN, J ;
WICKRAMASINGHE, HK .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :703-706
[2]   Parametric tip model and force-distance relation for Hamaker constant determination from atomic force microscopy [J].
Argento, C ;
French, RH .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (11) :6081-6090
[3]   Electrostatic forces acting on the tip in atomic force microscopy: Modelization and comparison with analytic expressions [J].
Belaidi, S ;
Girard, P ;
Leveque, G .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (03) :1023-1030
[4]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[5]   SURFACE STUDIES BY SCANNING TUNNELING MICROSCOPY [J].
BINNING, G ;
ROHRER, H ;
GERBER, C ;
WEIBEL, E .
PHYSICAL REVIEW LETTERS, 1982, 49 (01) :57-61
[6]   INTERACTION FORCE DETECTION IN SCANNING PROBE MICROSCOPY - METHODS AND APPLICATIONS [J].
DURIG, U ;
ZUGER, O ;
STALDER, A .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (05) :1778-1798
[7]   Use of capacitance to measure surface forces .1. Measuring distance of separation with enhanced spatial and time resolution [J].
Frantz, P ;
Agrait, N ;
Salmeron, M .
LANGMUIR, 1996, 12 (13) :3289-3294
[8]  
GIESSIBL FJ, 1995, SCIENCE, V267, P1451
[9]   Theory of electrostatic probe microscopy:: A simple perturbative approach [J].
Gómez-Moñivas, S ;
Sáenz, JJ ;
Carminati, R ;
Greffet, JJ .
APPLIED PHYSICS LETTERS, 2000, 76 (20) :2955-2957
[10]  
GOMEZMONIVAS S, IN PRESS APPL PHYS L