Preparation and Characterization of Transparent Conductive Nb-Doped ZnO Films by Radio-Frequency Sputtering

被引：12

作者：

Cao Feng ^{[1
]}

Wang Yi-Ding ^{[1
]}

Liu Da-Li ^{[1
]}

Yin Jing-Zhi ^{[1
]}

Guo Bao-Jia ^{[1
]}

Li Lei ^{[1
]}

An Yu-Peng ^{[1
]}

机构：

[1] Jilin Univ, State Key Lab Integrated Optoelect, Coll Elect Sci & Engn, Changchun 130012, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2009年 / 26卷 / 03期

关键词：

RF;

D O I：

10.1088/0256-307X/26/3/034210

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Niobium-doped ZnO (NZO) transparent conductive films are deposited on glass substrates by rf sputtering at 300 C. Effects of sputtering power on the structural, morphologic, electrical, and optical properties of NZO films are investigated by x-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), Hall measurement, and optical transmission spectroscopy. The obtained films are polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The minimum resistivity of 4.0 x 10(-4) Omega.cm is obtained from the film grown at the sputtering power of 170 W. The average optical transmittance of the films is over 90%.

引用

页数：3

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