Study of physical and photocatalytic properties of titanium dioxide thin films prepared from complex precursors by chemical vapour deposition

被引:84
作者
Bessergenev, VG
Pereira, RJF
Mateus, MC
Khmelinskii, L
Vasconcelos, DA
Nicula, R
Burkel, E
do Rego, AMB
Saprykin, AI
机构
[1] Univ Algarve, FCT, P-8005139 Faro, Portugal
[2] Univ Rostock, FB Phys, D-18055 Rostock, Germany
[3] Ctr Quim Fis Mol, IST, P-1049001 Lisbon, Portugal
[4] Russian Acad Sci, Inst Inorgan Chem, Novosibirsk 630090, Russia
关键词
thin films; titanium dioxide; CVD; photocatalysis;
D O I
10.1016/j.tsf.2005.10.046
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Titanium dioxide (TiO2) thin films were prepared using Titanium [bis(dipiraloymethanate) diisopropoxide] (Ti(dpm)(2)(OPri)(2)) and Titanium isopropoxide (Ti(OPri)(4)) complex compound precursors by Chemical Vapour Deposition (CVD) and photo-assisted CVD. Structural information on TiO2 thin films was obtained in synchrotron radiation experiments: high-resolution Grazing Incidence X-ray Diffraction (GIXRD) and 0-20 XRD experiments were performed on the high-resolution powder diffractometer at the Hamburg Synchrotron Laboratory. Chemical composition of thin films was Studied by high-resolution Laser Ionization Mass Spectrometry technique, surface composition by X-ray Photoelectron Spectroscopy, and surface morphology by Atomic Force Microscopy. Photocatalytic activity of TiO2 thin films was studied using a photocatalytic reactor. The fungicide Fenarimol was chosen as chemical indicator and its degradation kinetics was followed by High Performance Liquid Chromatography. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:29 / 39
页数:11
相关论文
共 45 条
[1]   Atomic layer deposition of TiO2 thin films from TiI4 and H2O [J].
Aarik, J ;
Aidla, A ;
Uustare, T ;
Kukli, K ;
Sammelselg, V ;
Ritala, M ;
Leskelä, M .
APPLIED SURFACE SCIENCE, 2002, 193 (1-4) :277-286
[2]   Preparation of TiO2 thin films by spray pyrolysis to be used as a photocatalyst [J].
Abou-Helal, MO ;
Seeber, WT .
APPLIED SURFACE SCIENCE, 2002, 195 (1-4) :53-62
[3]  
ADAMS DM, 1974, INORGANIC SOLIDS, P72
[4]   Characterization and photocatalytic activity of Au/TiO2 thin films for azo-dye degradation [J].
Arabatzis, IM ;
Stergiopoulos, T ;
Andreeva, D ;
Kitova, S ;
Neophytides, SG ;
Falaras, P .
JOURNAL OF CATALYSIS, 2003, 220 (01) :127-135
[5]  
AUPO M, 2003, J CATAL, V216, P505
[6]   Synthesis and properties of TiO2 thin films by plasma source ion implantation [J].
Baba, K ;
Hatada, R .
SURFACE & COATINGS TECHNOLOGY, 2001, 136 (1-3) :241-243
[7]   Preparation of TiO2 films by CVD method and its electrical, structural and optical properties [J].
Bessergenev, VG ;
Khmelinskii, IV ;
Pereira, RJF ;
Krisuk, VV ;
Turgambaeva, AE ;
Igumenov, IK .
VACUUM, 2002, 64 (3-4) :275-279
[8]   TiO2 thin film synthesis from complex precursors by CVD, its physical and photocatalytic properties [J].
Besserguenev, VG ;
Pereira, RJF ;
Mateus, MC ;
Khmelinskii, IV ;
Nicula, RC ;
Burkel, E .
INTERNATIONAL JOURNAL OF PHOTOENERGY, 2003, 5 (02) :99-105
[9]   Photocatalytic TiO2 deposition by chemical vapor deposition [J].
Byun, D ;
Jin, Y ;
Kim, B ;
Lee, JK ;
Park, D .
JOURNAL OF HAZARDOUS MATERIALS, 2000, 73 (02) :199-206
[10]   GENERATION OF AMORPHOUS CERAMIC CAPACITOR COATINGS ON TITANIUM USING A CONTINUOUS SOL-GEL PROCESS [J].
DIXON, BG ;
WALSH, MA ;
PHILLIPS, PG ;
MORRIS, RS .
JOURNAL OF MATERIALS RESEARCH, 1995, 10 (10) :2626-2630