Tetragonal distortion of c domains in fatigued Pb(Zr,Ti)O3 thin films determined by x-ray diffraction measurements with highly brilliant synchrotron radiation

被引：13

作者：

Kimura, S

Izumi, K

Tatsumi, T

机构：

[1] NEC Corp Ltd, Fundamental Res Labs, Tsukuba, Ibaraki 3058501, Japan

[2] NEC Corp Ltd, Silicon Syst Res Labs, Tsukuba, Ibaraki 3058501, Japan

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 13期

关键词：

D O I：

10.1063/1.1465132

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We performed x-ray diffraction measurements by using highly brilliant synchrotron radiation on only a small region of 250-nm-thick Pb(Zr0.33Ti0.67)O-3 polycrystalline films with gold top electrodes after applying various numbers of switching cycles of the electric field. The films were deposited on Pt/SiO2/Si substrates by low-temperature metalorganic chemical vapor deposition. The plane spacing and integrated intensity of 004 and 400 diffraction patterns were plotted against the number of switching cycles. We found a good correlation between the increase in 004-plane spacing and the decrease in remanent polarization. This correlation indicates that tetragonal distortion of c domains is closely related to the fatigue phenomenon. (C) 2002 American Institute of Physics.

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页码：2365 / 2367

页数：3

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