Method to measure spatial coherence of subangstrom electron beams

被引：40

作者：

Dwyer, Christian ^{[1
,2
]}

Erni, Rolf ^{[3
]}

Etheridge, Joanne ^{[1
]}

机构：

[1] Monash Univ, Monash Ctr Elect Microscopy, Clayton, Vic 3800, Australia

[2] Monash Univ, Dept Mat Engn, Clayton, Vic 3800, Australia

[3] Lawrence Berkeley Natl Lab, Natl Ctr Electron Microscopy, Berkeley, CA 94720 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 02期

基金：

澳大利亚研究理事会;

关键词：

D O I：

10.1063/1.2957648

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope (STEM) fitted with an objective lens aberration corrector. The method is applied to a C(s)-corrected 300 kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56 angstrom full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72 angstrom FWHM using a probe-forming aperture of 25 mrad and including the measured residual lens aberrations. (C) 2008 American Institute of Physics.

引用

页数：3

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