High-resolution photoemission study of acetylene adsorption and reaction with the Si(100)-2x1 surface

被引:41
作者
Xu, SH [1 ]
Yang, Y
Keeffe, M
Lapeyre, GJ
Rotenberg, E
机构
[1] Montana State Univ, Dept Phys, Bozeman, MT 59717 USA
[2] LBNL, Adv Light Source, Berkeley, CA 94720 USA
关键词
D O I
10.1103/PhysRevB.60.11586
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The adsorption and reaction of acetylene with the Si(100)-2X1 surface has been studied using high-resolution photoemission by monitoring the Si 2p, C 1s, and valence-band (VB) spectra as a function of both acetylene coverage and post-adsorption annealing temperature. After the clean Si(100) surface is exposed to 0.5 monolayer (ML) acetylene, the surface state in the VB is absent. Meanwhile, the curve-fitting results show that there is only one interface component in the Si 2p core level. These results indicate that the asymmetric Si dimers may become symmetric dimers after acetylene adsorption, which can be explained well by the tetra-sigma model determined from our previous photoelectron holographic results. Significant changes in the electronic structure (Si 2p, C 1s, and VB) are found after subsequent annealing of the saturation overlayer, Annealing at lower temperature can induce some acetylene molecule desorption while most of the molecules decompose into C2Hx (x= 1,0) and H species. After annealing above 660 degrees C, both of the reacted components of the Si 2p and C Is lines show that the SiC species form clustertike features. At the same time, the VB and Si 2p spectra indicate a restoration of a Si(100)-2X1 structure, and the asymmetric Si dimers reappear on the surface. [S0163-1829(99)02040-8].
引用
收藏
页码:11586 / 11592
页数:7
相关论文
共 26 条
[1]   EFFECT OF ATOMIC-HYDROGEN ON THE ACETYLENE ADSORBED SI(100)(2X1) SURFACE [J].
CHEN, Y ;
LIU, ZH ;
ZHANG, QZ ;
FENG, K ;
LIN, ZD .
APPLIED PHYSICS LETTERS, 1995, 67 (20) :2936-2938
[2]   ADSORPTION AND THERMAL-BEHAVIOR OF ETHYLENE ON SI(100)-(2X1) [J].
CLEMEN, L ;
WALLACE, RM ;
TAYLOR, PA ;
DRESSER, MJ ;
CHOYKE, WJ ;
WEINBERG, WH ;
YATES, JT .
SURFACE SCIENCE, 1992, 268 (1-3) :205-216
[3]   SiC formation by reaction of Si(001) with acetylene: Electronic structure and growth mode [J].
Dufour, G ;
Rochet, F ;
Stedile, FC ;
Poncey, C ;
DeCrescenzi, M ;
Gunnella, R ;
Froment, M .
PHYSICAL REVIEW B, 1997, 56 (07) :4266-4282
[4]   ON THE FORMATION OF SEMICONDUCTOR INTERFACES [J].
FLORES, F ;
TEJEDOR, C .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1987, 20 (02) :145-175
[5]   ADSORPTION OF ACETYLENE ON THE SI(100)-(2X1) SURFACE [J].
HUANG, C ;
WIDDRA, W ;
WANG, XS ;
WEINBERG, WH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :2250-2254
[6]   FIRST-PRINCIPLES MOLECULAR-DYNAMICS STUDY OF ACETYLENE ADSORPTION ON THE SI(001) SURFACE [J].
IMAMURA, Y ;
MORIKAWA, Y ;
YAMASAKI, T ;
NAKATSUJI, H .
SURFACE SCIENCE, 1995, 341 (03) :L1091-L1095
[7]   QUANTITATIVE-ANALYSIS OF SYNCHROTRON RADIATION PHOTOEMISSION CORE LEVEL DATA [J].
JOYCE, JJ ;
DELGIUDICE, M ;
WEAVER, JH .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1989, 49 (01) :31-45
[8]   STRONG ELEMENT DEPENDENCE OF C 1S AND SI 2P X-RAY PHOTOELECTRON DIFFRACTION PROFILES FOR IDENTICAL C AND SI LOCAL GEOMETRIES IN BETA-SIC [J].
JUILLAGUET, S ;
KUBLER, L ;
DIANI, M ;
BISCHOFF, JL ;
GEWINNER, G ;
WETZEL, P ;
BECOURT, N .
SURFACE SCIENCE, 1995, 339 (03) :363-371
[9]   SURFACE-STRUCTURE AND COMPOSITION OF BETA-SIC AND 6H-SIC [J].
KAPLAN, R .
SURFACE SCIENCE, 1989, 215 (1-2) :111-134
[10]   SIMULATIONS AND EXPERIMENTS OF SIC HETEROEPITAXIAL GROWTH ON SI(001) SURFACE [J].
KITABATAKE, M ;
DEGUCHI, M ;
HIRAO, T .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (07) :4438-4445