Electrical characterization of growth-induced defects in bulk-grown ZnO

被引:43
作者
Auret, FD [1 ]
Nel, JM
Hayes, M
Wu, L
Wesch, W
Wendler, E
机构
[1] Univ Pretoria, Dept Phys, ZA-0002 Pretoria, South Africa
[2] Univ Jena, Inst Festkorperphys, D-6900 Jena, Germany
关键词
D O I
10.1016/j.spmi.2005.08.021
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We have investigated and compared the defects in ZnO grown by two methods, namely seeded chemical vapour transport (SCVT) and melt-growth (MG), using conventional deep level transient spectroscopy (DLTS) and high resolution (Laplace) DLTS with An and Ru Schottky barrier diodes. Both materials contained two prominent defects, E1, at E-C-0.12 eV and E3 at E-C-0.29 eV. The SCVT ZnO has El as the main defect with a concentration of about 10(16) cm(-3). while the MG ZnO has E3 as the main defect with a concentration of above 10(16) cm(-3). It has been speculated that this defect is the oxygen vacancy in ZnO. High resolution Laplace DLTS Suggests that this level could consist of two closely spaced levels but with different capture cross-sections. The relative concentrations of these defects were found to vary across the region probed by DLTS. The E1 and E3 defects also showed opposite trends in all electric field: all increase in electric field enhanced emission from E1 whereas it slowed down emission from E3. The peak splitting and field dependence may, however, be a consequence of a non-exponential transient. Finally, etching in HCl:H2O did not affect the defect concentrations or introduce additional defects ill ZnO in the MG ZnO. (C) 2005 Published by Elsevier Ltd.
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页码:17 / 23
页数:7
相关论文
共 10 条
[1]   ZnO diode fabricated by excimer-laser doping [J].
Aoki, T ;
Hatanaka, Y ;
Look, DC .
APPLIED PHYSICS LETTERS, 2000, 76 (22) :3257-3258
[2]   The influence of high energy proton bombardment on the electrical and defect properties of single-crystal ZnO [J].
Auret, FD ;
Goodman, SA ;
Hayes, M ;
Legodi, MJ ;
van Laarhoven, HA ;
Look, DC .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2001, 13 (40) :8989-8999
[3]   LAPLACE TRANSFORM DEEP-LEVEL TRANSIENT SPECTROSCOPIC STUDIES OF DEFECTS IN SEMICONDUCTORS [J].
DOBACZEWSKI, L ;
KACZOR, P ;
HAWKINS, ID ;
PEAKER, AR .
JOURNAL OF APPLIED PHYSICS, 1994, 76 (01) :194-198
[4]   A CRITICAL ANALYSIS OF CAPACITANCE TRANSIENT SIGNALS DUE TO DX CENTERS IN N-TYPE ALGAAS [J].
IZPURA, I ;
MUNOZ, E ;
CALLEJA, E .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (07) :1258-1266
[5]  
Kligshirn C., 1975, PHYS STATUS SOLIDI B, V71, P547
[6]   DOUBLE CORRELATION TECHNIQUE (DDLTS) FOR ANALYSIS OF DEEP LEVEL PROFILES IN SEMICONDUCTORS [J].
LEFEVRE, H ;
SCHULZ, M .
APPLIED PHYSICS, 1977, 12 (01) :45-53
[7]   Production and annealing of electron irradiation damage in ZnO [J].
Look, DC ;
Reynolds, DC ;
Hemsky, JW ;
Jones, RL ;
Sizelove, JR .
APPLIED PHYSICS LETTERS, 1999, 75 (06) :811-813
[8]   Recent advances in ZnO materials and devices [J].
Look, DC .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 80 (1-3) :383-387
[9]   Fabrication and characterisation of NiO/ZnO structures [J].
Nel, JM ;
Auret, FD ;
Wu, L ;
Legodi, MJ ;
Meyer, WE ;
Hayes, M .
SENSORS AND ACTUATORS B-CHEMICAL, 2004, 100 (1-2) :270-276
[10]   CHARACTERIZATION OF DEEP LEVELS IN ZINC-OXIDE [J].
SIMPSON, JC ;
CORDARO, JF .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) :1781-1783