GaMnAs;
low temperature growth;
MBE;
process optimization;
D O I:
10.1007/BF03027015
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
We present a detailed growth optimization procedure and experimental results for the growth of GaMnAs magnetic semiconductors in low-temperature molecular beam epitaxy. They were explored by using in-situ monitoring of the surface reconstruction patterns, double crystal/high-resolution x-ray diffaction, conductivity measurement, and superconducting quantum interference device measurements. The results showed strong correlations among the measurements. The room temperature conductivity measurement, in particular, was found to be a useful tool in forecasting the ferromagnetic transition temperature of the films. High quality GaMnAs films could contain Mn up to similar to5% without MnAs segregation at substrate temperatures of 215similar to275degreesC. The highest transition temperature of 80 K, however, was measured from the sample with 3.7% Mn grown at the substrate temperature of 250degreesC and As-4 pressure of 1.4 x 10(-6) torr for a growth rate of 0.25 mum/hr.
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Ohno, Y
Young, DK
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机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Young, DK
Beschoten, B
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机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Beschoten, B
Matsukura, F
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h-index: 0
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Matsukura, F
Ohno, H
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h-index: 0
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Ohno, H
Awschalom, DD
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机构:
Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Ohno, Y
Young, DK
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Young, DK
Beschoten, B
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Beschoten, B
Matsukura, F
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Matsukura, F
Ohno, H
论文数: 0引用数: 0
h-index: 0
机构:Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA
Ohno, H
Awschalom, DD
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USAUniv Calif Santa Barbara, Quantum Inst, Ctr Spintron & Quantum Computat, Santa Barbara, CA 93106 USA