Fabrication and characterization of narrow-band Bragg-reflection filters in silicon-on-insulator ridge waveguides

被引:124
作者
Murphy, TE [1 ]
Hastings, JT
Smith, HI
机构
[1] MIT, Lincoln Lab, Lexington, MA 02420 USA
[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
关键词
Bragg scattering; gratings; optical planar waveguides; ridge waveguides; silicon-on-insulator (SOI) technology; waveguide components; waveguide filters;
D O I
10.1109/50.971688
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe the design, fabrication and measurement of an integrated-optical Bragg grating filter, operating at a free-space wavelength of 1543 nm, based upon a silicon-on-insulator (SOI) ridge waveguide. The measured spectral response for a 4-mm long grating has a bandwidth of 15 GHz (0.12 nm), and shows good agreement with theoretical predictions.
引用
收藏
页码:1938 / 1942
页数:5
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