Si overgrowth on Si(111)root 3x root 3-B surface phase

被引:12
作者
Zotov, AV [1 ]
Kulakov, MA [1 ]
Ryzhkov, SV [1 ]
Lifshits, VG [1 ]
Bullemer, B [1 ]
Eisele, I [1 ]
机构
[1] RUSSIAN ACAD SCI,INST AUTOMAT & CONTROL PROC,VLADIVOSTOK 690041,RUSSIA
关键词
boron; growth; low energy electron diffraction (LEED); molecular beam epitaxy; scanning tunneling microscopy; silicon; surface diffusion; surface segregation;
D O I
10.1016/0039-6028(95)01160-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Si(111)root 3 X root 3-B surface phase has been formed by high-temperature annealing of B-doped Si samples. Low-energy electron diffraction observations have revealed that the Si(111)root 3 X root 3-B surface phase is very stable with respect to heating and that the root 3 X root 3 reconstruction is still detected at temperature as high as 950 degrees C. Scanning tunnelling microscopy has been used to study the growth of Si on Si(111)root 3 x root 3-B surface. At low temperatures (20-300 degrees C) the growth has been found to be affected greatly by surface defects which trap Si atoms and act as sites of preferential island nucleation. At temperatures of Si(111) epitaxy (greater than or equal to 400 degrees C) Si islands grow amorphous up to a certain critical size and then ''crystallize'' to form epitaxial islands with a thickness of two Si(111) bilayers. The structure on top of epitaxial Si islands is always root 3 X root 3 which suggests boron segregation to the surface.
引用
收藏
页码:358 / 363
页数:6
相关论文
共 13 条
[1]  
AGARWAL PM, 1989, J CHEM PHYS, V91, P6463
[2]   STRUCTURE OF (SQUARE-ROOT-3 X SQUARE-ROOT-3) R 30-DEGREES-B AT THE SI INTERFACE STUDIED BY GRAZING-INCIDENCE X-RAY-DIFFRACTION [J].
AKIMOTO, K ;
HIROSAWA, I ;
TATSUMI, T ;
HIRAYAMA, H ;
MIZUKI, JI ;
MATSUI, J .
APPLIED PHYSICS LETTERS, 1990, 56 (13) :1225-1227
[3]   ADSORPTION OF BORON ON SI(111) - PHYSICS, CHEMISTRY, AND ATOMIC-SCALE ELECTRONIC DEVICES [J].
AVOURIS, P ;
LYO, IW ;
BOZSO, F ;
KAXIRAS, E .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04) :3405-3411
[4]   THE SI(111) 7X7 TO 1X1 TRANSITION [J].
BENNETT, PA ;
WEBB, MW .
SURFACE SCIENCE, 1981, 104 (01) :74-104
[5]   STABILITY OF BORON-INDUCED AND GALLIUM-INDUCED SURFACE-STRUCTURES ON SI(111) DURING DEPOSITION AND EPITAXIAL-GROWTH OF SILICON [J].
HEADRICK, RL ;
FELDMAN, LC ;
ROBINSON, IK .
APPLIED PHYSICS LETTERS, 1989, 55 (05) :442-444
[6]   AN ULTRA-HIGH-RESOLUTION CONTROL UNIT FOR A SCANNING TUNNELING MICROSCOPE [J].
HEUELL, P ;
CUZDI, S ;
KULAKOV, MA ;
BULLEMER, B .
THIN SOLID FILMS, 1995, 264 (02) :217-222
[7]  
KOHLER U, 1989, J VAC SCI TECHNOL A, V7, P2860, DOI 10.1116/1.576159
[8]   FORMATION OF SI(111)SQUARE-ROOT-3 X SQUARE-ROOT-3-B AND SI EPITAXY ON SI(111)SQUARE-ROOT-3 X SQUARE-ROOT-3-B - LEED AES STUDY [J].
KOROBTSOV, VV ;
LIFSHITS, VG ;
ZOTOV, AV .
SURFACE SCIENCE, 1988, 195 (03) :466-474
[9]   INFLUENCE OF BORON ADSORPTION OVER SI(111) SURFACE ON SI MOLECULAR-BEAM EPITAXIAL-GROWTH STUDIES BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION [J].
KUMAGAI, Y ;
MORI, R ;
ISHIMOTO, K ;
HASEGAWA, F .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1994, 33 (6B) :L817-L819
[10]   LOW-ENERGY ELECTRON-DIFFRACTION BEAM PROFILES AND PHASE-TRANSITION AT SI(111)-7 X 7 SURFACE [J].
MCRAE, EG ;
MALIC, RA .
SURFACE SCIENCE, 1985, 161 (01) :25-32