Seeded growth of AlN on N- and Al-polar ⟨0 0 0 1⟩ AlN seeds by physical vapor transport

被引：82

作者：

Herro, ZG ^{[1
]}

Zhuang, D ^{[1
]}

Schlesser, R ^{[1
]}

Collazo, R ^{[1
]}

Sitar, Z ^{[1
]}

机构：

[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

来源：

JOURNAL OF CRYSTAL GROWTH | 2006年 / 286卷 / 02期

关键词：

crystal morphology; sublimation growth; aluminum nitride;

D O I：

10.1016/j.jcrysgro.2005.10.074

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

We demonstrated seeded growth of AlN on large-area Al- and N-polar < 0 0 0 1 > -oriented AlN seeds using the physical vapor transport method (PVT). In both cases, crystals having a diameter of 15 mm were obtained from 5 man seeds. Based on growth step and terrace width analyses, it was found that the N-polar face was suitable for growth within a large window of growth parameters while the At-polar seeds yielded high-quality crystals only at low supersaturation. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：205 / 208

页数：4

共 16 条

[1] Characterization of bulk AlN with low oxygen content [J].

Bickermann, M ;

Epelbaum, BM ;

Winnacker, A .

JOURNAL OF CRYSTAL GROWTH, 2004, 269 (2-4) :432-442

[2] THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J].

BURTON, WK ;

CABRERA, N ;

FRANK, FC .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) :299-358

[3] AlN bulk crystals grown on SiC seeds [J].

Dalmau, R ;

Schlesser, R ;

Rodriguez, BJ ;

Nemanich, RJ ;

Sitar, Z .

JOURNAL OF CRYSTAL GROWTH, 2005, 281 (01) :68-74

[4]

DALMAU R, 2004, MAT RES SOC S P, V798

[5] Bulk AlN crystal growth: self-seeding and seeding on 6H-SiC substrates [J].

Edgar, JH ;

Liu, L ;

Liu, B ;

Zhuang, D ;

Chaudhuri, J ;

Kuball, M ;

Rajasingam, S .

JOURNAL OF CRYSTAL GROWTH, 2002, 246 (3-4) :187-193

[6] Sublimation growth of bulk AIN crystals: process temperature and growth rate [J].

Epelbaum, BM ;

Bickermann, M ;

Winnacker, A .

SILICON CARBIDE AND RELATED MATERIALS 2003, PRTS 1 AND 2, 2004, 457-460 :1537-1540

[7] Natural growth habit of bulk AlN crystals [J].

Epelbaum, BM ;

Seitz, C ;

Magerl, A ;

Bickermann, M ;

Winnacker, A .

JOURNAL OF CRYSTAL GROWTH, 2004, 265 (3-4) :577-581

[8] Growth of 6H-SIC crystals along the [011-5] direction [J].

Herro, ZG ;

Epelbaum, BM ;

Bickermann, M ;

Seitz, C ;

Magerl, A ;

Winnacker, A .

JOURNAL OF CRYSTAL GROWTH, 2005, 275 (3-4) :496-503

[9]

Liu LH, 2001, MRS INTERNET J N S R, V6, P1

[10] Mass transfer in A1N crystal growth at high temperatures [J].

Noveski, V ;

Schlesser, R ;

Mahajan, S ;

Beaudoin, S ;

Sitar, Z .

JOURNAL OF CRYSTAL GROWTH, 2004, 264 (1-3) :369-378

← 1 2 →