Electron transport in bipolar transistors with biaxially strained base layers

被引:2
作者
Beisswanger, FJ
Jorke, H
机构
[1] Daimler-Benz AG, Forschungszentrum Ulm
关键词
D O I
10.1109/16.477594
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In silicon npn bipolar junction transistors grown on (100) oriented substrate, at base doping levels in excess of 10(20) boron atoms/cm(3), strain induced splitting of the normally sixfold degenerated conduction band minimum becomes important and needs to be considered in modeling of injection currents. The biaxial tensile strain, originating in the smaller covalent radius of boron compared to silicon, induces a lowering of two valleys with heavy effective mass in vertical direction whereas the remaining four valleys are raised in energy. Using a coupled set of equations for the electron gas systems in the twofold and fourfold degenerated valleys, emitter and collector current formulas fire derived, In die relevant ease of strong f-type intervalley scattering rates compared to Anger recombination rates (which holds at least up to about 10(21) cm(-3)) collector currents are described by(V-EC = 0V) jc = -eD(n4)n(4,0)+D(n2)n(2,0)/w(eV(BE)/V-th-1) provided that the electron diffusion length is large compared to the base width w., D-n4 D-n2, and n(4,0), n(2,0) are diffusion constants and equilibrium minority carrier concentrations in the two electron gas systems, respectively. In Si/SiGe heterojunction bipolar transistors the conduction band situation in the base is similar to that fn extremely heavily boron doped (homojunction) base layers as presence of Ge also causes die conduction band minimum to split (splitting is, however, of opposite sign), Thus, the transport model discussed here likely applies also to that kind of device.
引用
收藏
页码:62 / 69
页数:8
相关论文
共 24 条
[1]  
[Anonymous], SEMICONDUCTORS
[2]  
BEISSWANGER F, 1995, IN PRESS J CRYSTAL G
[3]  
BEISSWANGER F, 1994, NOV P WORKSH SIL BAS
[4]  
BEISSWANGER F, 1994, THESIS U ULM
[5]   DIFFUSION-COEFFICIENT OF ELECTRONS IN SILICON [J].
BRUNETTI, R ;
JACOBONI, C ;
NAVA, F ;
REGGIANI, L ;
BOSMAN, G ;
ZIJLSTRA, RJJ .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6713-6722
[6]   FORWARD-BIAS TUNNELING - A LIMITATION TO BIPOLAR DEVICE SCALING [J].
DELALAMO, JA ;
SWANSON, RM .
IEEE ELECTRON DEVICE LETTERS, 1986, 7 (11) :629-631
[7]   AUGER COEFFICIENTS FOR HIGHLY DOPED AND HIGHLY EXCITED SILICON [J].
DZIEWIOR, J ;
SCHMID, W .
APPLIED PHYSICS LETTERS, 1977, 31 (05) :346-348
[8]   INTRINSIC CONCENTRATION, EFFECTIVE DENSITIES OF STATES, AND EFFECTIVE MASS IN SILICON [J].
GREEN, MA .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (06) :2944-2954
[9]   DIFFUSION IN A SHORT BASE [J].
GRINBERG, AA ;
LURYI, S .
SOLID-STATE ELECTRONICS, 1992, 35 (09) :1299-1309
[10]  
GRUHLE A, 1994, SILICON BASED MILLIM