Characteristic electroforming behavior in Pt/TiO2/Pt resistive switching cells depending on atmosphere

被引:256
作者
Jeong, Doo Seok [1 ,2 ,4 ]
Schroeder, Herbert [1 ,2 ]
Breuer, Uwe [3 ]
Waser, Rainer [1 ,2 ]
机构
[1] Res Ctr Julich, Inst Solid State Res, D-52425 Julich, Germany
[2] Res Ctr Julich, JARA Fundamentals Future Informat Technol, D-52425 Julich, Germany
[3] Res Ctr Julich, Cent Div Analyt Chem, D-52425 Julich, Germany
[4] Korea Inst Sci & Technol, Thin Film Mat Res Ctr, Seoul 136791, South Korea
关键词
electrical resistivity; electroforming; MIM structures; platinum; time of flight mass spectra; titanium compounds; vacancies (crystal);
D O I
10.1063/1.3043879
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electroforming effects on the composition, structure, and electrical resistance of Pt/TiO2/Pt switching cells are investigated. The correlation between the electroforming procedure and the resulting bipolar switching behavior is discussed. The dependence of electroforming behavior on atmosphere is also identified, from which we define symmetric or asymmetric electroforming. The symmetry of electroforming is a key factor determining the resulting bipolar switching characteristics. From the experimental results we suggest a possible mechanism for electroforming in Pt/TiO2/Pt in terms of the formation of oxygen gas and vacancies in the vicinity of the anode.
引用
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页数:8
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