A large-area ECR processing plasma

被引：14

作者：

Miyazawa, W

Tada, S

Ito, K

Saito, H

Den, SJ

Hayashi, Y

Okamoto, Y

Sakamoto, Y

机构：

[1] IRIE KOKEN CO LTD,KAWAGOE,SAITAMA 35011,JAPAN

[2] TOYO UNIV,FAC ENGN,KAWAGOE,SAITAMA 35011,JAPAN

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1996年 / 5卷 / 02期

关键词：

D O I：

10.1088/0963-0252/5/2/021

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

This paper describes an improved large-diameter electron cyclotron resonance (ECR) source which employs a strip-bar antenna. By launching a 2.45 GHz microwave near the magnetic field of permanent magnets of alternative polarity set along closed loops, an ECR plasma is produced. The source diameter is 30 cm. The characteristics of an oxygen plasma produced with this modified source are an electron density of 1.4 x 10(11) cm(-3), electron temperature of 3 eV and space potential with respect to the chamber wall of less than 20 V. A high plasma density of uniformity within +/-3.8% over 30 cm is achieved.

引用

页码：265 / 267

页数：3

共 8 条

[1] PLASMA IONIZATION BY HELICON WAVES [J].