ELECTRON-CYCLOTRON-RESONANCE DEVICES WITH PERMANENT-MAGNETS FOR PRODUCTION OF LARGE-DIAMETER UNIFORM PLASMAS

被引：13

作者：

IIZUKA, S

SATO, N

机构：

[1] Department of Electronic Engineering, Tohoku University, Sendai

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

ECR PLASMA; UNIFORM PLASMA; LARGE-DIAMETER PLASMA; PERMANENT MAGNETS; PLASMA PROCESSING;

D O I：

10.1143/JJAP.33.4221

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteristic points are clarified and the most optimal device construction and arrangement are discussed from a viewpoint of producing uniform plasmas necessary for large-scale plasma processing.

引用

页码：4221 / 4225

页数：5

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