Real space soft x-ray imaging at 10 nm spatial resolution

被引：194

作者：

Chao, W. ^{[1
]}

Fischer, P. ^{[1
]}

Tyliszczak, T. ^{[2
]}

Rekawa, S. ^{[1
]}

Anderson, E. ^{[1
]}

Naulleau, P. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Adv Light Source, Berkeley, CA 94720 USA

来源：

OPTICS EXPRESS | 2012年 / 20卷 / 09期

关键词：

MICROSCOPY; WORKING;

D O I：

10.1364/OE.20.009777

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies. (c) 2012 Optical Society of America

引用

页码：9777 / 9783

页数：7

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