Ultrahigh-Resolution Soft-X-Ray Microscopy with Zone Plates in High Orders of Diffraction

被引：112

作者：

Rehbein, S. ^{[1
]}

Heim, S. ^{[1
]}

Guttmann, P. ^{[1
]}

Werner, S. ^{[1
]}

Schneider, G. ^{[1
]}

机构：

[1] Helmholtz Zentrum Berlin Materialien & Energie Gm, Elektronenspeicherring BESSY 2, D-12489 Berlin, Germany

来源：

PHYSICAL REVIEW LETTERS | 2009年 / 103卷 / 11期

关键词：

SPATIAL-RESOLUTION;

D O I：

10.1103/PhysRevLett.103.110801

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We present an x-ray optical approach to overcome the current limitations in spatial resolution of x-ray microscopes. Our new BESSY full-field x-ray microscope operates with an energy resolution up to E/Delta E = 10(4). We demonstrate that under these conditions it is possible to employ high orders of diffraction for imaging. Using the third order of diffraction of a zone plate objective with 25 nm outermost zone width, 14 nm lines and spaces of a multilayer test structure were clearly resolved. We believe that high-order imaging paves the way towards sub-10-nm real space x-ray imaging.

引用

页数：4

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