Core structure of thermal donors in silicon

被引:64
作者
Chadi, DJ
机构
[1] NEC Research Institute, Princeton, NJ, 08540-6634
关键词
D O I
10.1103/PhysRevLett.77.861
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Aggregation of oxygen impurities as a result of thermal annealing gives rise to ''thermal'' double donor defects in Si and Ge. A microscopic structure for the core of these defects is proposed on the basis of first-principles calculations. In Si, the core contains three oxygen atoms,exhibits bistability, and has a total energy appreciably lower than three isolated oxygen interstitials. Impurities such as B, Al, N, and H are found to bind strongly to the defect and to transform it into a shallow single donor.
引用
收藏
页码:861 / 864
页数:4
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共 45 条
[41]   EFFICIENT PSEUDOPOTENTIALS FOR PLANE-WAVE CALCULATIONS [J].
TROULLIER, N ;
MARTINS, JL .
PHYSICAL REVIEW B, 1991, 43 (03) :1993-2006
[42]   UNIFIED MODEL FOR FORMATION KINETICS OF OXYGEN THERMAL DONORS IN SILICON [J].
WADA, K .
PHYSICAL REVIEW B, 1984, 30 (10) :5884-5895
[43]   THERMAL DOUBLE DONORS IN SILICON [J].
WAGNER, P ;
HAGE, J .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 49 (02) :123-138
[44]   ALIGNMENT OF THERMAL DONORS IN SI BY UNIAXIAL-STRESS [J].
WAGNER, P ;
GOTTSCHALK, H ;
TROMBETTA, J ;
WATKINS, GD .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) :346-354
[45]   DEFECTS IN IRRADIATED SILICON .1. ELECTRON SPIN RESONANCE OF SI-A CENTER [J].
WATKINS, GD ;
CORBETT, JW .
PHYSICAL REVIEW, 1961, 121 (04) :1001-&