Semiconductor physics - Quick-set thin films

被引：9

作者：

Kanatzidis, MG ^{[1
]}

机构：

[1] Michigan State Univ, Dept Chem, E Lansing, MI 48824 USA

来源：

NATURE | 2004年 / 428卷 / 6980期

关键词：

D O I：

10.1038/428269a

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Transistors that have active components based on thin films, rather than silicon, are attractive for many applications. The latest thin-film fabrication technique has the potential for industrial-scale production.

引用

页码：269 / +

页数：2

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