Adsorption and decomposition of H2S on the Ge(100) surface

被引:26
作者
Nelen, LM [1 ]
Fuller, K [1 ]
Greenlief, CM [1 ]
机构
[1] Univ Missouri, Dept Chem, Columbia, MO 65211 USA
基金
美国国家科学基金会;
关键词
germanium; dihydrogen sulfide; ultraviolet photoelectron spectroscopy; surface chemical reaction;
D O I
10.1016/S0169-4332(99)00224-X
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The adsorption and decomposition of H2S on the Ge(100) surface is investigated. H2S is a simple sulfur containing molecule that eventually decomposes to yield hydrogen gas and deposits sulfur on the germanium surface. The surface reactions of H2S are investigated by ultraviolet photoelectron spectroscopy, Auger electron spectroscopy, and temperature programmed desorption. Room temperature exposure of H2S to Ge(100) results in dissociative adsorption which can be followed easily by ultraviolet photoelectron spectroscopy. Warming the H2S exposed surface results in some molecular desorption and further decomposition of the adsorbed species. At saturation, 0.25 ML of H2S decomposes generating 0.5 ML of atomic hydrogen. Above the hydrogen desorption temperature some etching of the germanium surface is observed by sulfur. The etch product, GeS, is subsequently observed in. temperature programmed desorption experiments. Exposure of H2S to the Ge surface at elevated temperatures leads to higher sulfur coverages. A sulfur coverage approaching 0.5 ML can be deposited at the higher exposure temperatures. (C) 1999 Elsevier:Science B.V. All rights reserved.
引用
收藏
页码:65 / 72
页数:8
相关论文
共 26 条
[1]   Preparation of high-quality Ge substrate for MBE [J].
Akane, T ;
Tanaka, J ;
Okumura, H ;
Matsumoto, S .
APPLIED SURFACE SCIENCE, 1997, 108 (02) :303-305
[2]   THE S-PASSIVATION OF GE(100)-(1X1) [J].
ANDERSON, GW ;
HANF, MC ;
NORTON, PR ;
LU, ZH ;
GRAHAM, MJ .
APPLIED PHYSICS LETTERS, 1995, 66 (09) :1123-1125
[3]   CHEMICAL ETCHING AND CLEANING PROCEDURES FOR SI, GE, AND SOME III-V COMPOUND SEMICONDUCTORS [J].
ASPNES, DE ;
STUDNA, AA .
APPLIED PHYSICS LETTERS, 1981, 39 (04) :316-318
[4]  
CHEN J, 1996, THESIS U MISSOURI CO
[5]   ADSORPTION AND DECOMPOSITION OF HYDRIDES ON GE(100) [J].
COHEN, SM ;
YANG, YML ;
ROUCHOUZE, E ;
JIN, T ;
DEVELYN, MP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :2166-2171
[6]   PHOTOELECTRON SPECTRA OF METHYL, SILYL AND GERMYL DERIVATIVES OF GROUP-VI ELEMENTS [J].
CRADOCK, S ;
WHITEFOR.RA .
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS II, 1972, 68 (02) :281-&
[7]   SURFACE PI-BONDING AND THE NEAR-1ST-ORDER DESORPTION-KINETICS OF HYDROGEN FROM GE(100)2X1 [J].
DEVELYN, MP ;
COHEN, SM ;
ROUCHOUZE, E ;
YANG, YL .
JOURNAL OF CHEMICAL PHYSICS, 1993, 98 (04) :3560-3563
[8]   ADSORPTION, DESORPTION, AND DECOMPOSITION OF HCL AND HBR ON GE(100) - COMPETITIVE PAIRING AND NEAR-FIRST-ORDER DESORPTION-KINETICS [J].
DEVELYN, MP ;
YANG, YML ;
COHEN, SM .
JOURNAL OF CHEMICAL PHYSICS, 1994, 101 (03) :2463-2475
[9]   Scanning tunneling microscopy of chemically cleaned germanium (100) surfaces [J].
Gan, S ;
Li, L ;
Nguyen, T ;
Qi, H ;
Hicks, RF ;
Yang, M .
SURFACE SCIENCE, 1998, 395 (01) :69-74
[10]   Etching and a disordered overlayer on the Ge(100)-S surface [J].
Gothelid, M ;
LeLay, G ;
Wigren, C ;
Bjorkqvist, M ;
Rad, M ;
Karlsson, UO .
APPLIED SURFACE SCIENCE, 1997, 115 (01) :87-95