Optical microscopy of electronic and structural properties of epitaxial laterally overgrown GaN

被引:56
作者
Kaschner, A
Hoffmann, A
Thomsen, C
Bertram, F
Riemann, T
Christen, J
Hiramatsu, K
Shibata, T
Sawaki, N
机构
[1] Tech Univ Berlin, Inst Festkorperphys, D-10623 Berlin, Germany
[2] Otto Von Guericke Univ, Inst Expt Phys, D-39016 Magdeburg, Germany
[3] Mie Univ, Dept Elect & Elect Engn, Mie 5148507, Japan
[4] Nagoya Univ, Dept Elect, Nagoya, Aichi 46401, Japan
关键词
D O I
10.1063/1.123331
中图分类号
O59 [应用物理学];
学科分类号
摘要
Local strain relaxation as well as inhomogeneous impurity incorporation in epitaxial laterally overgrown GaN (ELOG) structures is microscopically characterized using spectrally resolved scanning cathodoluminescence (CL) and micro-Raman spectroscopy. We correlate the different CL emission spectra with results of spatially resolved Raman-scattering experiments sensing the local strain and free-carrier concentration. (C) 1999 American Institute of Physics. [S0003-6951(99)03220-9].
引用
收藏
页码:3320 / 3322
页数:3
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