Complex refractive-index measurement based on Fresnel's equations and the uses of heterodyne interferometry

被引：85

作者：

Chiu, MH

Lee, JY

Su, DC

机构：

[1] Chien Hsin Coll Technol & Commerce, Dept Elect Engn, Chungli 320, Taiwan

[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 300, Taiwan

来源：

APPLIED OPTICS | 1999年 / 38卷 / 19期

关键词：

D O I：

10.1364/AO.38.004047

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The phase difference between s and p polarization of the light reflected from a material is used for measuring the material's complex refractive index. First, two phase differences that correspond to two different incidence angles are measured by heterodyne interferometry. Then these two phase differences are substituted into Fresnel's equations, and a set of simultaneous equations is obtained. Finally, the equations are solved by use of a personal computer by a numerical analysis technique, and the complex refractive index of the material can be estimated. (C) 1999 Optical Society of America.

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收藏

页码：4047 / 4052

页数：6

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