Dependence of energy distributions of sputtered and reflected atoms on incident fluence

被引：5

作者：

Eckstein, W ^{[1
]}

Dohmen, R ^{[1
]}

Friedrich, H ^{[1
]}

Hertweck, F ^{[1
]}

机构：

[1] Max Planck Inst Plasmaphys, D-85748 Garching, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 153卷 / 1-4期

关键词：

D O I：

10.1016/S0168-583X(98)01016-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The energy distributions of sputtered and reflected atoms from a target consisting of equal parts of Cu and W are determined with the dynamic Monte Carlo program TRIDYN Versus the fluence of incident Ar. TRIDYN is adjusted for the use on a parallel computer. The distributions are reconstructed from their stored moments with the maximum entropy method. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：345 / 349

页数：5

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