Wave field restoration using three-dimensional Fourier filtering method

被引：29

作者：

Kawasaki, T

Takai, Y

Ikuta, T

Shimizu, R

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan

[2] Osaka Electrocommun Univ, Dept Appl Elect, Neyagawa, Osaka 5720833, Japan

[3] Osaka Inst Technol, Dept Informat Proc, Hirakata, Osaka 5730196, Japan

来源：

ULTRAMICROSCOPY | 2001年 / 90卷 / 01期

关键词：

high-resolution electron microscopy; wave field restoration; spherical aberration correction; 3D Fourier transform; 3D image formation theory;

D O I：

10.1016/S0304-3991(01)00122-X

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A wave field restoration method in transmission electron microscopy (TEM) was mathematically derived based on a three-dimensional (3D) image formation theory. Wave field restoration using this method together with spherical aberration correction was experimentally confirmed in through-focus images of amorphous tungsten thin film, and the resolution of the reconstructed phase image was successfully improved from the Scherzer resolution limit to the information limit. In an application of this method to a crystalline sample, the surface structure of Au(110) was observed in a profile-imaging mode. The processed phase image showed quantitatively the atomic relaxation of the topmost layer. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：47 / 59

页数：13

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