Deformation of nanoscopic polymer structures in response to well-defined capillary forces

被引：62

作者：

Stoykovich, MP

Cao, HB

Yoshimoto, K

Ocola, LE

Nealey, PF

机构：

[1] Univ Wisconsin, Dept Chem Engn, Madison, WI 53706 USA

[2] Univ Wisconsin, Ctr Nanotechnol, Madison, WI 53706 USA

[3] Agere Syst, Adv Lithog Res, Murray Hill, NJ 07974 USA

来源：

ADVANCED MATERIALS | 2003年 / 15卷 / 14期

关键词：

D O I：

10.1002/adma.200305059

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The development of strategies to measure the properties of materials with nanoscopic dimensions is a necessary but challenging topic in nanoscale science and technology. Here, combinatorial arrays of specially designed test structures are used to quantify the deformation of micro- and nanoscale polymer beams in response to well-defined capillary forces. In the Figure, increasing capillary forces from left to right act on beams 95 nm wide.

引用

页码：1180 / +

页数：6

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