Miniaturized flexible temperature sensor

被引：175

作者：

Moser, Yves ^{[1
]}

Gijs, Maitin A. M. ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Microelect & Microsyst, CH-1015 Lausanne, Switzerland

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2007年 / 16卷 / 06期

关键词：

high temperature sensor; polyimide; thin-film platinum resistor;

D O I：

10.1109/JMEMS.2007.908437

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We realize a flexible temperature sensor based on a micropatterned thin-film platinum resistor. The sensor is situated at the end of a 100-mu m-wide and 7-cm-long probe. The latter consists of a biocompatible high-temperature-resistant polyimide (U-Varnish-S, UBE Industries, Tokyo, Japan) in which the platinum resistor and the electrical contact leads are embedded. The sensor is operational from 0 degrees C up to 400 degrees C and has a time constant of less than 80 ms. Such a sensor can potentially be used to characterize the thermo-ablation process of tumors using hot steam injection via a microtube.

引用

页码：1349 / 1354

页数：6

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