Diamond: a material for acoustic devices

被引:31
作者
Mortet, V. [1 ,2 ]
Williams, O. A. [1 ,2 ]
Haenen, K. [1 ,2 ]
机构
[1] Hasselt Univ, Inst Mat Res, B-3590 Diepenbeek, Belgium
[2] IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2008年 / 205卷 / 05期
关键词
D O I
10.1002/pssa.200777502
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond has been foreseen to replace silicon for high power, high frequency electronic applications or for devices that operates in harsh environments. However, diamond electronic devices are still in the laboratory stage due to the lack of large substrates and the complexity of diamond doping. On another hand, surface acoustic wave filters based on diamond are commercially available. Diamond is especially suited for acoustic applications because of its exceptional mechanical properties. The other properties of diamond such as bio-inertness and chemical stability certainly make of diamond a key material for the next generation of acoustic sensors. In this article, we try to detail the interest of diamond films in composite acoustic applications and review the different type of acoustic devices/sensor.
引用
收藏
页码:1009 / 1020
页数:12
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