Three-Dimensional Electron Microscopy Simulation with the CASINO Monte Carlo Software

被引：288

作者：

Demers, Hendrix ^{[1
]}

Poirier-Demers, Nicolas ^{[1
]}

Couture, Alexandre Real ^{[1
]}

Joly, Dany ^{[1
]}

Guilmain, Marc ^{[1
]}

de Jonge, Niels ^{[2
]}

Drouin, Dominique ^{[1
]}

机构：

[1] Univ Sherbrooke, Dept Elect & Comp Engn, Sherbrooke, PQ J1K 2R1, Canada

[2] Vanderbilt Univ, Sch Med, Dept Mol Physiol & Biophys, Nashville, TN 37212 USA

来源：

SCANNING | 2011年 / 33卷 / 03期

基金：

加拿大自然科学与工程研究理事会;

关键词：

Monte Carlo simulation; scanning electron microscopy; scanning transmission electron microscopy; secondary electron; three-dimensional (3D); IMAGE-CONTRAST; MICROANALYSIS; SCATTERING;

D O I：

10.1002/sca.20262

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Monte Carlo softwares are widely used to understand the capabilities of electron microscopes. To study more realistic applications with complex samples, 3D Monte Carlo softwares are needed. In this article, the development of the 3D version of CASINO is presented. The software feature a graphical user interface, an efficient (in relation to simulation time and memory use) 3D simulation model, accurate physic models for electron microscopy applications, and it is available freely to the scientific community at this website: www.gel.usherbrooke.ca/casino/index.html. It can be used to model backscattered, secondary, and transmitted electron signals as well as absorbed energy. The software features like scan points and shot noise allow the simulation and study of realistic experimental conditions. This software has an improved energy range for scanning electron microscopy and scanning transmission electron microscopy applications. SCANNING 33: 135-146, 2011. (C) 2011 Wiley Periodicals, Inc.

引用

页码：135 / 146

页数：12

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