Application of Monte Carlo simulation to SEM image contrast of complex structures

A new Monte Carlo technique for the simulation of scanning electron microscopy (SEM) images for an inhomogeneous specimen with a complex geometric structure has been developed. The simulation is based on constructive solid geometry (CSG) modelling, i.e. constructive solid geometry modelling with simple geometric structures, as well as a ray-tracing technique for correction of electron step-length sampling when an electron trajectory crosses the interface of the inhomogeneous structures. This correction is important for the simulation of nano-scale structures whose size is comparable with or even less than the electron-scattering mean free paths. Copyright (C) 2005 John Wiley & Sons, Ltd.