Development of SiC/MgO distributed bragg reflector using RF magnetron sputtering technique

被引：2

作者：

Anuar, Khairul M. S. ^{[1
]}

Soetedjo, Hariyadi ^{[1
]}

Sharizal, Mohd A. ^{[1
]}

Sufian, S. M. ^{[1
]}

Boon, Goh T. ^{[2
]}

Richard, R. ^{[2
]}

Saadah, A. R. ^{[2
]}

Razman, Mohamed Y. ^{[1
]}

Fatah, Abdul A. M. ^{[1
]}

机构：

[1] Univ Putra Malaysia, UPM MTDC, Telekom Res & Dev Sdn, Microelect & Nano Technol Program, Bhd,Idea Tower, Serdang 43400, Malaysia

[2] Univ Malaya, Dept Phys, Solid State Res Lab, Kuala Lumpur, Malaysia

来源：

2006 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS | 2006年

关键词：

D O I：

10.1109/SMELEC.2006.381085

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

A Bragg mirror structure is an essential part for vertical cavity surface emission laser (VCSEL) applications. High optical reflectance at required stopband width is one of major concern by means of application requirements. For this purpose, Bragg mirrors consisting of SiC/MgO multilayers have been developed using an RF magnetron sputtering technique at room temperature. These structures have been characterized using various measurement techniques like ellipsometry, reflectance spectroscopy, Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM) and X-ray diffraction (XRD) technique. From these measurements, it was confirmed that mirror materials were deposited on the substrates. For application requirement, the DBR mirror structure fabricated using only a seven period SiC/MgO multilayered structure produced the expected stop-band at 850 nm wavelength with high reflectivity of 95%.

引用

页码：378 / +

页数：2

共 14 条

[1]

Heterostructure solar cells [J].