The role of Ti interlayer in carbon nanotube growth

被引：10

作者：

Chuang, Chia-Chih ^{[2
]}

Liu, Wei-Long ^{[1
]}

Chen, Wen-Jauh ^{[1
]}

Huang, Jin-Hua ^{[3
]}

机构：

[1] Natl Formosa Univ, Dept Mat Sci & Engn, Huwei 632, Taiwan

[2] Photovoltaics Technol Ctr, Ind Technol Res Inst, Hsinchu 310, Taiwan

[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

SURFACE & COATINGS TECHNOLOGY | 2008年 / 202卷 / 10期

关键词：

carbon nanotube (CNT); Ti interlayer; thermal chemical vapor deposition (TCVD); growth mechanism;

D O I：

10.1016/j.surfcoat.2007.08.069

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Vertically aligned multi-wall carbon nanotubes (CNTs) were grown on Ni/Ti/Si substrate by thermal chemical vapor deposition method in a microwave heating system. The results showed that vertically aligned CNTs could be uniformly grown on a large area substrate of 3 inch diameter. The Ti interlayer couldn't obstruct the interdiffusion of Ni and Si and the inward diffusion of O, Ti and C. The C atoms for CNTs growth were supplied from Ni particles at an early stage and from Ti interlayer at a later stage in the growth process. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：2121 / 2125

页数：5

共 30 条

[1] An approach to the structural diversity of aligned grown multi-walled carbon nanotubes on catalyst layers [J].

Bartsch, K ;

Leonhardt, A .

CARBON, 2004, 42 (8-9) :1731-1736

[2] Large-area synthesis of carbon nanofibres at room temperature [J].

Boskovic, BO ;

Stolojan, V ;

Khan, RUA ;

Haq, S ;

Silva, SRP .

NATURE MATERIALS, 2002, 1 (03) :165-168

[3] Silicon oxide thickness-dependent growth of carbon nanotubes [J].

Cao, AY ;

Ajayan, PM ;

Ramanath, G ;

Baskaran, R ;

Turner, K .

APPLIED PHYSICS LETTERS, 2004, 84 (01) :109-111

[4] REMOVAL OF END-OF-RANGE DEFECTS IN BF2+ IMPLANTED (111)SI BY THE GRAIN-GROWTH OF THIN NISI2 OVERLAYER [J].

CHEN, WJ ;

CHEN, LJ .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (10) :7322-7324

[5] TEM investigation on the growth mechanism of carbon nanotubes synthesized by hot-filament chemical vapor deposition [J].

Chen, XH ;

Wang, RM ;

Xu, J ;

Yu, DP .

MICRON, 2004, 35 (06) :455-460

[6] Hydrogen storage in carbon nanotubes [J].

Cheng, HM ;

Yang, QH ;

Liu, C .

CARBON, 2001, 39 (10) :1447-1454

[7] Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition [J].

Chhowalla, M ;

Teo, KBK ;

Ducati, C ;

Rupesinghe, NL ;

Amaratunga, GAJ ;

Ferrari, AC ;

Roy, D ;

Robertson, J ;

Milne, WI .

JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) :5308-5317

[8]

CHIO WS, 2006, MAT SCI ENG C-BIO S, V26, P1215

[9]

CHIO WS, 2006, MATER SCI ENG, V26, P1211

[10] Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition [J].

Choi, YC ;

Shin, YM ;

Lee, YH ;

Lee, BS ;

Park, GS ;

Choi, WB ;

Lee, NS ;

Kim, JM .

APPLIED PHYSICS LETTERS, 2000, 76 (17) :2367-2369

← 1 2 3 →