ELLIPSOMETRY OF THIN FILM SYSTEMS

被引：94

作者：

Ohlidal, Ivan ^{[1
]}

Franta, Daniel ^{[1
]}

机构：

[1] Masaryk Univ, Fac Sci, Dept Phys Elect, CS-61137 Brno, Czech Republic

来源：

PROGRESS IN OPTICS, VOL 41 | 2000年 / 41卷

关键词：

D O I：

10.1016/S0079-6638(00)80018-9

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：181 / 282

页数：102

共 157 条

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