Mobility simulation of a novel Si/SiGe FET structure

被引:10
作者
Abramo, A
Bude, J
Venturi, F
Pinto, MR
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
[2] UNIV PARMA,DEPT INFORMAT TECHNOL,I-43100 PARMA,ITALY
关键词
D O I
10.1109/55.484123
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The theoretical study of a novel Si/SiGe structure combining the advantages of buried channel MOS devices and conventional SiGe FET's is presented, A self-consistent one-dimensional Schrodinger-Poisson simulator has been developed to evaluate the gate dependence of electron effective mobility ire the zero-field limit, Room temperature peak mobility values greater than 2800 cm(2)/V s are predicted, The proposed structure shows also good turn-on characteristic and linear transconductance behavior, which represents a significant feature in view of possible technology applications.
引用
收藏
页码:59 / 61
页数:3
相关论文
共 12 条
[1]  
ABRAMO A, 1994, INTERNATIONAL ELECTRON DEVICES MEETING 1994 - IEDM TECHNICAL DIGEST, P731, DOI 10.1109/IEDM.1994.383285
[2]   MONTE-CARLO STUDY OF ELECTRON-TRANSPORT IN SILICON INVERSION-LAYERS [J].
FISCHETTI, MV ;
LAUX, SE .
PHYSICAL REVIEW B, 1993, 48 (04) :2244-2274
[3]  
Ishizaka M., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P763, DOI 10.1109/IEDM.1990.237049
[4]   HIGH-PERFORMANCE SI/SIGE N-TYPE MODULATION-DOPED TRANSISTORS [J].
ISMAIL, K ;
RISHTON, S ;
CHU, JO ;
CHAN, K ;
MEYERSON, BS .
IEEE ELECTRON DEVICE LETTERS, 1993, 14 (07) :348-350
[5]   EXTREMELY HIGH-ELECTRON-MOBILITY IN SI/SIGE MODULATION-DOPED HETEROSTRUCTURES [J].
ISMAIL, K ;
ARAFA, M ;
SAENGER, KL ;
CHU, JO ;
MEYERSON, BS .
APPLIED PHYSICS LETTERS, 1995, 66 (09) :1077-1079
[6]   THE MONTE-CARLO METHOD FOR THE SOLUTION OF CHARGE TRANSPORT IN SEMICONDUCTORS WITH APPLICATIONS TO COVALENT MATERIALS [J].
JACOBONI, C ;
REGGIANI, L .
REVIEWS OF MODERN PHYSICS, 1983, 55 (03) :645-705
[7]   ROOM-TEMPERATURE ELECTRON-MOBILITY IN STRAINED SI/SIGE HETEROSTRUCTURES [J].
NELSON, SF ;
ISMAIL, K ;
CHU, JO ;
MEYERSON, BS .
APPLIED PHYSICS LETTERS, 1993, 63 (03) :367-369
[8]   SILICON MOS TRANSCONDUCTANCE SCALING INTO THE OVERSHOOT REGIME [J].
PINTO, MR ;
SANGIORGI, E ;
BUDE, J .
IEEE ELECTRON DEVICE LETTERS, 1993, 14 (08) :375-378
[9]   BAND LINEUPS AND DEFORMATION POTENTIALS IN THE MODEL-SOLID THEORY [J].
VAN DE WALLE, CG .
PHYSICAL REVIEW B, 1989, 39 (03) :1871-1883
[10]   HIGH-MOBILITY MODULATION-DOPED GRADED SIGE-CHANNEL P-MOSFETS [J].
VERDONCKTVANDEBROEK, S ;
CRABBE, EF ;
MEYERSON, BS ;
HARAME, DL ;
RESTLE, PJ ;
STORK, JMC ;
MEGDANIS, AC ;
STANIS, CL ;
BRIGHT, AA ;
KROESEN, GMW ;
WARREN, AC .
IEEE ELECTRON DEVICE LETTERS, 1991, 12 (08) :447-449