Computer-assisted optical emission tomography in a radiofrequency capacitively coupled plasma

被引：13

作者：

Kitajima, T

Izawa, M

Hashido, R

Nakano, N

Makabe, T

机构：

[1] Department of Electrical Engineering, Faculty of Science and Technology, Keio University, Yokohama 223

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 06期

关键词：

D O I：

10.1063/1.117882

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Temporal characteristics of two-dimensional (2D) spatial images of a net production rate in a capacitively coupled plasma (CCP) reactor driven at high frequency (13.56 MHz) are investigated by newly developed computer-assisted optical emission tomography. Typical examples are presented for the absolute net formation rate of Ar(3p(5)) in Ar for 2 Torr and 13.56 MHz. The tomographic imaging enables us to understand a complex radial discharge structure in a CCP reactor, as well as in the central axial region. (C) 1996 American Institute of Physics.

引用

收藏

页码：758 / 760

页数：3

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