A new model of dependence of secondary electron emission yield on primary electron energy for application to polymers

被引:49
作者
Cazaux, J [1 ]
机构
[1] Fac Sci, UTAP, LASSI, F-51687 Reims, France
关键词
D O I
10.1088/0022-3727/38/14/020
中图分类号
O59 [应用物理学];
学科分类号
摘要
A new analytical model for the secondary electron (SE) emission yield, 6, is applied to polymers. It involves a parameter k, k = z(C)/R, between the most probable energy dissipation depth, z(C), of primary electrons (PE) and their range R, where k ranges from 0.5 and 0.45 for low-density, low atomic-weight materials. Reduced yield curves (RYC), delta/delta((max)) versus E-0/E-0 and normal yield curves, delta versus E-0, obtained from published experimental data on a wide variety of polymers (polystyrene, PET, polyimide; Kapton; PTFE; Teflon, PMMA, nylon, polyurethane) are compared with the calculated change of 6 with PE energy, E0. In contrast to the use of the conventional constant loss model where the best fit requires an empirical change in the exponent V in the power law expression of the PE range, delta versus E0, the present approach is based on the usual choice for n, n = 1.35, and on a choice for k governed by physical arguments. This physical basis then enables one to predict the RYC of other polymers. Finally, values of the SE escape probability and SE attenuation length are estimated for the polymers of interest and a new mechanism is suggested for the contrast reversal in scanning electron microscopy.
引用
收藏
页码:2433 / 2441
页数:9
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