Spatial variation of luminescence in thick GaN films

被引:16
作者
Bertram, F [1 ]
Srinivasan, S
Ponce, FA
Riemann, T
Christen, J
Molnar, RJ
机构
[1] Arizona State Univ, Dept Phys & Astron, Tempe, AZ 85287 USA
[2] Univ Magdeburg, Lincoln Lab, D-39016 Magdeburg, Germany
关键词
D O I
10.1063/1.1350594
中图分类号
O59 [应用物理学];
学科分类号
摘要
The spatial variation of the optical properties of hydride vapor-phase epitaxial GaN layers of various thickness has been studied using scanning cathodoluminescence microscopy. A strong improvement of these properties with film thickness is observed in plan view. Cross-sectional studies show a strong redshift of the luminescence in the vicinity of the substrate within a typical thickness of about 2 mum, reflecting a high local impurity content. Above this initial growth region, a strong blueshift is observed up to the energy of fully relaxed high-purity GaN, indicating vertical strain relaxation as well as depletion of residual donors. This is accompanied by a sharp increase in the lateral spectral homogeneity, indicative of a significant improvement in crystalline quality. (C) 2001 American Institute of Physics.
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收藏
页码:1222 / 1224
页数:3
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