Fabrication and packaging of integrated chemo-optical sensors

被引:40
作者
Heideman, RG
Veldhuis, GJ
Jager, EWH
Lambeck, PV
机构
[1] MESA Research Institute, University of Twente, 7500 AE Enschede
关键词
chemo-optical sensor; zinc oxide (ZnO); electro-optic; phase modulation; Mach-Zehnder interferometer; fiber-to-chip coupling;
D O I
10.1016/S0925-4005(97)80061-5
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
This paper describes the design and fabrication of a sensitive integrated chemo-optical sensor supplied with on-chip fiber-to-waveguide connectors. The sensor is designed for TE-polarized light with wavelength of 633 nm. The fiber-to-chip connectors are based on easily fabricated silicon V-grooves combined with a smooth sawcut. The sawcut is defining the channel waveguide endface. The sensor is based on a phase modulated Mach-Zehnder interferometer, using the electro-optic effect of the waveguiding material zinc oxide (ZnO). The fiber-to-chip connector units have a typical coupling efficiency of 0.1-1%. The electro-optical voltage x length product V-pi is 15 +/- 4 V cm at frequencies above 100 Hz. Preliminary experiments on the general (passive) sensor response showing its expected high sensitivity are discussed.
引用
收藏
页码:234 / 240
页数:7
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