共 14 条
- [1] Aksenov I. I., 1978, Fizika Plazmy, V4, P758
- [2] AKSENOV II, 1978, SOV J PLASMA PHYS, V4, P425
- [4] METAL PLASMA IMMERSION ION-IMPLANTATION AND DEPOSITION USING VACUUM-ARC PLASMA SOURCES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 815 - 820
- [7] BIERSACK JP, 1991, NUCL INSTRUM METH PH, V56, P21
- [10] CROCKER RW, 1993, STRUCTURAL TRANSFORM