Correlation between structure and optical properties in low emissivity coatings for solar thermal collectors

被引:34
作者
Yuste, M. [1 ,3 ]
Escobar Galindo, R. [1 ,2 ]
Sanchez, O. [1 ]
Cano, D. [3 ]
Casasola, R. [4 ]
Albella, J. M. [1 ]
机构
[1] CSIC, Inst Ciencia Mat, E-28049 Madrid, Spain
[2] Univ Autonoma Madrid, Ctr Microanal Mat, E-28049 Madrid, Spain
[3] Fdn Rafael Escola, E-28001 Madrid, Spain
[4] Isofoton, E-29590 Malaga, Spain
关键词
Low-emissivity; TiN; Optical transmittance; Magnetron sputtering; CHEMICAL-VAPOR-DEPOSITION; TIN FILMS; THIN-FILMS; SUBSTRATE; CONSTANTS; ENERGY;
D O I
10.1016/j.tsf.2010.05.056
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have investigated the relation between the structure and morphology of TiN coatings with their optical properties. Samples were deposited by magnetron sputtering and, by changing the deposition parameters, different textures and chemical compositions can be obtained as measured by X-ray diffraction and glow discharge optical emission spectroscopy respectively. The transmittance in the visible range, measured by spectroscopic ellipsometry, and the emittance, derived from reflectance in the far infrared range as measured by Fourier Transform Infrared Spectroscopy have been related to the nitrogen atomic content and the preferred crystalline orientations present in the TIN coatings. The visible transmittance of the coatings was found not to be dependent on the preferential orientation, while the emittance clearly improves with increasing the film thickness and the presence of both (111) and (200) crystal orientations. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:5720 / 5723
页数:4
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