Stochastic subwavelength structures on poly(methyl methacrylate) surfaces for antireflection generated by plasma treatment

被引:6
作者
Leitel, Robert [1 ,2 ]
Schulz, Ulrike [2 ]
Kaiser, Norbert [2 ]
Tuennermann, Andreas [1 ,2 ]
机构
[1] Univ Jena, Inst Appl Phys, D-07743 Jena, Germany
[2] Fraunhofer Inst Appl Opt & Precis Engn, D-07745 Jena, Germany
关键词
D O I
10.1364/AO.47.00C143
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Subwavelength structures of sufficient height-to-width aspect ratio are adequate for reduction of the Fresnel reflection of surfaces. In the case of low-pressure plasma-treated polymers, the self-organized features are stochastically distributed on the surface area with unequal shapes. Common descriptions use effective medium theory along with a continuously altering volume filling factor that together lead to a lateral homogeneous layer with a depth-dependent refractive index. We use a fixed gradient function for the refractive index for reverse engineering of in situ measured broadband optical data, and we compare the results with nonoptic methods. (C) 2008 Optical Society of America.
引用
收藏
页码:C143 / C146
页数:4
相关论文
共 13 条
[1]  
[Anonymous], 2003, Encyclopedia of Optical Engineering
[2]  
BERNHARD CG, 1967, ENDEAVOUR, V26, P79
[4]   Toward perfect antireflection coatings: numerical investigation [J].
Dobrowolski, JA ;
Poitras, D ;
Ma, P ;
Vakil, H ;
Acree, M .
APPLIED OPTICS, 2002, 41 (16) :3075-3083
[5]   Subwavelength-structured antireflective surfaces on glass [J].
Gombert, A ;
Glaubitt, W ;
Rose, K ;
Dreibholz, J ;
Bläsi, B ;
Heinzel, A ;
Sporn, D ;
Döll, W ;
Wittwer, V .
THIN SOLID FILMS, 1999, 351 (1-2) :73-78
[6]   NANO-motheye antireflection pattern by plasma treatment of polymers [J].
Kaless, A ;
Schulz, U ;
Munzert, P ;
Kaiser, N .
SURFACE & COATINGS TECHNOLOGY, 2005, 200 (1-4) :58-61
[7]  
Leitel Robert, 2005, Proceedings of the SPIE - The International Society for Optical Engineering, V5965, P596510, DOI 10.1117/12.624363
[8]   Broadband Antireflective Structures on PMMA by Plasma Treatment [J].
Leitel, Robert ;
Kaless, Antje ;
Schulz, Ulrike ;
Kaiser, Norbert .
PLASMA PROCESSES AND POLYMERS, 2007, 4 :S878-S881
[9]  
Macleod H.A., 2001, THIN FILM OPTICAL FI
[10]   Toward perfect antireflection coatings. 2. Theory [J].
Poitras, D ;
Dobrowolski, JA .
APPLIED OPTICS, 2004, 43 (06) :1286-1295