Threshold voltage definition and extraction for deep-submicron MOSFETs

被引:21
作者
Zhou, X [1 ]
Lim, KY [1 ]
Qian, W [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
Constant-current method - Deep-submicron devices - Short-channel effects;
D O I
10.1016/S0038-1101(01)00035-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The subtle difference in MOSFET threshold voltage between the two popular definitions, maximum-g(m) and constant current, is investigated in the deep-submicron regime. The result pinpoints to the importance of the lateral-field effect in linear region at very short gate length, and further supports the combined definition known as the "critical current at linear threshold" method, which includes short-channel effects while retaining the simplicity and consistency of the constant-current method. (C) 2001 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:507 / 510
页数:4
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