The effect of the surface layer of tetrahedral amorphous carbon films on their tribological and electron emission properties investigated by atomic force microscopy

被引：31

作者：

Liu, DP ^{[1
]}

Benstetter, G ^{[1
]}

Frammelsberger, W ^{[1
]}

机构：

[1] Univ Appl Sci, Dept Elect Engn, D-94469 Deggendorf, Germany

来源：

APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 22期

关键词：

D O I：

10.1063/1.1581367

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The nanowear resistance, tribological, and field emission properties of tetrahedral amorphous carbon (ta-C) films have been analyzed by atomic force microscope (AFM)-based wear testing technique, lateral force microscope, and conducting AFM. The ta-C films grown by filtered pulsed cathodic arc discharge were found to have soft surface layers, 1.1 +/- 0.1 nm thick, which contribute to an improvement of their field emission properties. The low friction coefficient between the nanotip and film surface is correlated to one or two graphite-like atomic layers at the ta-C film surfaces. The analysis of Fowler - Nordheim tunneling currents indicates the formation of filament-like emission channels in amorphous carbon films. (C) 2003 American Institute of Physics.

引用

页码：3898 / 3900

页数：3