共 18 条
[2]
OXIDATION OF SILICON IN AN ELECTRON-CYCLOTRON RESONANCE OXYGEN PLASMA - KINETICS, PHYSICOCHEMICAL, AND ELECTRICAL-PROPERTIES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (03)
:2924-2930
[3]
Choi YW, 1999, IEEE ELECTR DEVICE L, V20, P2, DOI 10.1109/55.737555
[5]
FUKUSHIMA Y, 1993, 1993 INT C SOL STAT, P993
[7]
EFFECTS OF TRAP STATE ON FIELD-EFFECT MOBILITY OF MOSFETS FORMED ON LARGE-GRAIN POLYSILICON FILMS
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS,
1989, 28 (12)
:L2291-L2293