Atomic force microscope cantilevers for combined thermomechanical data writing and reading

被引：155

作者：

King, WP ^{[1
]}

Kenny, TW

Goodson, KE

Cross, G

Despont, M

Dürig, U

Rothuizen, H

Binnig, GK

Vettiger, P

机构：

[1] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA

[2] IBM Res Corp, Zurich Res Lab, CH-8803 Ruschlikon, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2001年 / 78卷 / 09期

关键词：

D O I：

10.1063/1.1351846

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Heat conduction governs the ultimate writing and reading capabilities of a thermomechanical data storage device. This work investigates transient heat conduction in a resistively heated atomic force microscope cantilever through measurement and simulation of cantilever thermal and electrical behavior. The time required to heat a single cantilever to bit-writing temperature is near 1 mus and the thermal data reading sensitivity DeltaR/R is near 1 x 10(-4) per vertical nm. Finite-difference thermal and electrical simulation results compare well with electrical measurements during writing and reading, indicating design tradeoffs in power requirements, data writing speed, and data reading sensitivity. We present a design for a proposed cantilever that is predicted to be faster and more sensitive than the present cantilever. (C) 2001 American Institute of Physics.

引用

页码：1300 / 1302

页数：3

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